Radio frequency detectors Inficon SION RF et al.
Radio frequency detectors are non—invasive overhead RF detectors that provide stricter control and higher performance in chemical vapor deposition (CVD) and etching processes due to reliable and accurate determination of the end point of chamber purity. A more accurate endpoint means lower particle levels on the plate and more time between preventive maintenance cycles.
Models: SION RF, SION, ADC100.
DOCUMENTS
- Радиочастотный детектор SION для обнаружения плазменной дуги. Технические характеристики (eng).
- Радиочастотный детектор SION RF для контроля оконечных устройств. Технические характеристики (eng).
- Детектор дуги постоянного тока ADC100. Технические характеристики (eng).
- Система интеграции и анализа FabGuard. Технические характеристики.
All Inficon products
The group "New Technologies" offers for review the products of the plant Inficon: leak detectors, service tools, wide-range vacuum sensors, quartz control crystals, radio frequency detectors, thin-film deposition controllers, residual gas analyzers, vacuum inlets, accessories
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Leak detectorsPROTEC P3000(XL), etc. -
Service toolD-TEK Select, etc. -
Crystals for quartz controlAT-cut, 008-010-G10, etc. -
Wide-range vacuum sensorsPSG50, PSG 502-S, etc. -
High-precision vacuum sensorsEdge CDG100D2, etc. -
Thin-film deposition controllersIC6, Cygnus 2, etc. -
Radio frequency detectorsSION RF et al. -
Vacuum inletsISO-KF/ISO-K, etc. -
Residual gas analyzersTranspector MPH, etc. -
Chemical detection and identificationHAPSITE CDT, etc. -
Discontinued productsRQCM, PM-700, etc. -
AccessoriesTGF11, 590-621, etc.
About Inficon
INFICON Company (Switzerland) is a recognized leader in the field of innovative tools, technologies for the development of sensitive elements and modern devices for process control, devices necessary to ensure the necessary performance and quality of complex modern industrial processes of vacuum technology.
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application
The products are used to detect gas leaks in air conditioning systems, medicine, oil and gas, food industry, etc. -
assortment
INFICON's product range includes controllers, vacuum pumps, leak detectors, vacuum meters and other equipment. -
quality
The corporate management system meets the requirements of ISO 14001. Most of the equipment is manufactured in accordance with RoHS.
Information Board Inficon
Learn more about our products Inficon.
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Catalog of vacuum sensors Inficon -
Catalog of service leak detectors Inficon -
Catalog of leak detectors Inficon -
Catalog of thin-film crystals Inficon (eng) -
Catalog for equipment for monitoring the thickness of the spraying Inficon (eng) -
Questionnaire Inficon
NEW TECHNOLOGIES GROUP
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